Micro/Nano Structures and Systems : Analysis, Design, Manufacturing, and Reliability

doi:10.3390/books978-3-0365-6544-6

dc.contributor.editor	Georgantzinos, Stelios K.
dc.date.accessioned	2023-02-02T16:45:23Z
dc.date.available	2023-02-02T16:45:23Z
dc.date.issued	2023
dc.identifier	ONIX_20230202_9783036565453_135
dc.identifier.uri	https://directory.doabooks.org/handle/20.500.12854/96734
dc.description.abstract	Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability is a comprehensive guide that explores the various aspects of micro- and nanostructures and systems. From analysis and design to manufacturing and reliability, this reprint provides a thorough understanding of the latest methods and techniques used in the field. With an emphasis on modern computational and analytical methods and their integration with experimental techniques, this reprint is an invaluable resource for researchers and engineers working in the field of micro- and nanosystems, including micromachines, additive manufacturing at the microscale, micro/nano-electromechanical systems, and more. Written by leading experts in the field, this reprint offers a complete understanding of the physical and mechanical behavior of micro- and nanostructures, making it an essential reference for professionals in this field.
dc.language	English
dc.subject.classification	thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues	en_US
dc.subject.other	deployable structure
dc.subject.other	compliant mechanism
dc.subject.other	bistable mechanism
dc.subject.other	programmable behaviour
dc.subject.other	5G
dc.subject.other	mmWave
dc.subject.other	SIW
dc.subject.other	hybrid feeding
dc.subject.other	SIC
dc.subject.other	wide bandwidth
dc.subject.other	ECC
dc.subject.other	stable high gain
dc.subject.other	isolation
dc.subject.other	MEG
dc.subject.other	DIG
dc.subject.other	SAR
dc.subject.other	SSL
dc.subject.other	metamaterials (MMTs)
dc.subject.other	DRAs
dc.subject.other	Fano resonance
dc.subject.other	SPPs
dc.subject.other	U-shaped ring resonator
dc.subject.other	sensor
dc.subject.other	metal-insulator-metal
dc.subject.other	micropump
dc.subject.other	magnetorheological
dc.subject.other	MRE
dc.subject.other	magneto-solid-fluid interaction
dc.subject.other	additive manufacturing
dc.subject.other	microscale
dc.subject.other	design
dc.subject.other	materials
dc.subject.other	processes
dc.subject.other	applications
dc.subject.other	atomic layer deposition
dc.subject.other	sacrificial templates
dc.subject.other	3D nanostructures
dc.subject.other	EDM
dc.subject.other	SiCp/Al
dc.subject.other	recast layer
dc.subject.other	residual stress
dc.subject.other	solidification
dc.subject.other	deep-narrow groove
dc.subject.other	GH4169 alloy
dc.subject.other	electrochemical milling
dc.subject.other	wedged end face
dc.subject.other	micro automotive electronic pump
dc.subject.other	computational fluid dynamics
dc.subject.other	numerical simulation
dc.subject.other	experimental techniques
dc.subject.other	cavitation
dc.subject.other	thermodynamic effects
dc.subject.other	InP
dc.subject.other	SiC
dc.subject.other	flip-chip bonding
dc.subject.other	millimeter wave
dc.subject.other	heterogeneous integration
dc.subject.other	linear guide
dc.subject.other	decoupling mechanism
dc.subject.other	finite element analysis
dc.subject.other	micro-milling
dc.subject.other	wear
dc.subject.other	tool failure
dc.subject.other	coating
dc.subject.other	substrate
dc.subject.other	delamination
dc.subject.other	Fresnel zone plate
dc.subject.other	annular structure
dc.subject.other	femtosecond laser machining
dc.subject.other	concentric double-ring beams
dc.subject.other	MEMs
dc.subject.other	burn-in
dc.subject.other	quality
dc.subject.other	reliability
dc.subject.other	warranty
dc.subject.other	maintenance
dc.subject.other	optimization
dc.subject.other	degradation
dc.subject.other	material properties
dc.subject.other	test structures
dc.subject.other	stress gradients
dc.subject.other	thin-film material properties
dc.subject.other	micro- and nano-systems (MNS) fabrication and manufacturing
dc.subject.other	microstructures
dc.subject.other	nanostructures
dc.subject.other	mechanics
dc.subject.other	analysis
dc.title	Micro/Nano Structures and Systems
dc.title.alternative	Analysis, Design, Manufacturing, and Reliability
dc.type	book
oapen.identifier.doi	10.3390/books978-3-0365-6544-6
oapen.relation.isPublishedBy	46cabcaa-dd94-4bfe-87b4-55023c1b36d0
oapen.relation.isbn	9783036565453
oapen.relation.isbn	9783036565446
oapen.pages	322
oapen.place.publication	Basel

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