High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

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Author(s)
Luo, Ding
Language
EnglishAbstract
An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically accelerating the speed of 3D confocal microscopy.
Keywords
chromatisch; konfokal; 3D Messtechnik; Mikroskopie; chromatic; confocal; 3D measurement technology; microscopy; thema EDItEUR::U Computing and Information Technology::UY Computer science::UYA Mathematical theory of computation::UYAM Maths for computer scientistsISBN
9783731510611Publisher
KIT Scientific PublishingPublisher website
http://www.ksp.kit.edu/Publication date and place
Karlsruhe, 2021Series
Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung,Classification
Maths for computer scientists