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dc.contributor.editorTakahata, Kenichi
dc.date.accessioned2021-04-20T14:54:12Z
dc.date.available2021-04-20T14:54:12Z
dc.date.issued2009
dc.identifierONIX_20210420_9789533070278_80
dc.identifier.urihttps://directory.doabooks.org/handle/20.500.12854/64724
dc.description.abstractThis book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
dc.languageEnglish
dc.subject.classificationbic Book Industry Communication::T Technology, engineering, agriculture::TJ Electronics & communications engineering::TJF Electronics engineeringen_US
dc.subject.otherElectronics engineering
dc.titleMicro Electronic and Mechanical Systems
dc.typebook
oapen.identifier.doi10.5772/121
oapen.relation.isPublishedBy78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6
oapen.relation.isbn9789533070278
oapen.relation.isbn9789535158479
oapen.imprintIntechOpen
oapen.pages526


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