Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Download Url(s)
https://www.ksp.kit.edu/9783731501220Author(s)
Meckbach, Johannes Maximilian
Language
EnglishAbstract
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.
Keywords
Superconductor; Quantum; Multilayer; Cryogenics; JosephsonISBN
9783731501220Publisher
KIT Scientific PublishingPublisher website
http://www.ksp.kit.edu/Publication date and place
2013Series
Karlsruher Schriftenreihe zur Supraleitung / Hrsg. Prof. Dr.-Ing. M. Noe, Prof. Dr. rer. nat. M. Siegel,Classification
Technology: general issues