TY  - BOOK
AU  - Masato Sone
AU  - Kazuya Masu
AB  - Gold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In the field of MEMS devices, the demand for continuous miniaturization and sensitivity enhancement is always high. Especially for MEMS accelerometers, sensitivity is affected by Brownian noise, and components with sufficient mass are needed to suppress this noise. Therefore, it is difficult to reduce the dimensions of components to allow further miniaturization of the device. This book presents recent progress in noble metal electrodeposition and applications of gold-based materials in the realization of highly sensitive CMOS-MEMS accelerometers.
DO  - 10.5772/intechopen.73382
ID  - OAPEN ID: 37791
KW  - Physical Sciences
KW  - Engineering and Technology
KW  - Materials Science
KW  - Metals and Nonmetals
L1  - https://www.intechopen.com/books/novel-metal-electrodeposition-and-the-recent-application
LA  - English
LK  - https://directory.doabooks.org/handle/20.500.12854/54876
PB  - IntechOpen
PY  - 2019
SN  - 9781789852967
SN  - 9781789852950
TI  - Novel Metal Electrodeposition and the Recent Applicationnull
ER  - 
