TY - BOOK AU - Zamkotsian, Frederic AU - Xie, Huikai AB - Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense. DO - 10.3390/books978-3-03921-304-7 ID - OAPEN ID: 42468 KW - stray light KW - input shaping KW - n/a KW - wavefront sensing KW - signal-to-noise ratio (SNR) KW - LC micro-lenses controlled electrically KW - infrared KW - intraoperative microscope KW - MEMS mirror KW - MLSSP KW - ocular aberrations KW - MEMS scanning micromirror KW - electrothermal actuation KW - electrothermal bimorph KW - open-loop control KW - wavelength dependent loss (WDL) KW - NIR fluorescence KW - infrared Fabry–Perot (FP) filtering KW - two-photon KW - resonant MEMS scanner KW - residual oscillation KW - 3D measurement KW - parametric resonance KW - digital micromirror device KW - quality map KW - metalens KW - flame retardant 4 (FR4) KW - angle sensor KW - optical switch KW - metasurface KW - vibration noise KW - optical coherence tomography KW - spectrometer KW - reliability KW - quasistatic actuation KW - Huygens’ metalens KW - confocal KW - large reflection variations KW - electrostatic KW - dual-mode liquid-crystal (LC) device KW - field of view (FOV) KW - scanning micromirror KW - fluorescence confocal KW - variable optical attenuator (VOA) KW - micro-electro-mechanical systems (MEMS) KW - microscanner KW - laser stripe width KW - polarization dependent loss (PDL) KW - fringe projection KW - 2D Lissajous KW - usable scan range KW - laser stripe scanning KW - bio-optical imaging KW - MEMS scanning mirror KW - digital micromirror device (DMD) KW - Cu/W bimorph KW - echelle grating KW - achromatic KW - DMD chip KW - tunable fiber laser KW - programmable spectral filter KW - higher-order modes KW - electromagnetic actuator L1 - https://mdpi.com/books/pdfview/book/1477 LA - English LK - https://directory.doabooks.org/handle/20.500.12854/55304 PB - MDPI - Multidisciplinary Digital Publishing Institute PY - 2019 SN - 9783039213030 SN - 9783039213047 TI - Optical MEMSnull ER -